WAFER CONTAINER
To provide a wafer container capable of preventing a damage due to a contact when a wafer is carried in/out.SOLUTION: A wafer container according to an embodiment, comprises: a housing having a carry-in port for housing a plurality of wafers in column and carrying the wafers; a plurality of base gui...
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| Format: | Patent |
| Sprache: | eng ; jpn |
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| Zusammenfassung: | To provide a wafer container capable of preventing a damage due to a contact when a wafer is carried in/out.SOLUTION: A wafer container according to an embodiment, comprises: a housing having a carry-in port for housing a plurality of wafers in column and carrying the wafers; a plurality of base guides that is along a predetermined carry-in direction in the housing, and forming a plurality of base slits into which each wafer is arranged; and a plurality of extension guides that is arranged to the carry-in side of the plurality of base guides and extends the slit to the carry-in side. A length of each base slit formed by each base guide in the carry-in direction is shorter than that of the wafer, and a total length of the guide slits formed by each base guide and the extension guide is larger than the length of the wafer.SELECTED DRAWING: Figure 1
【課題】ウェハを出し入れする際の接触による破損を防ぐことができるウェハ容器を提供する。【解決手段】 一形態にかかるウェハ容器は、ウェハを複数列に収納するとともに前記ウェハを搬入する搬入口を有する筐体と、前記筐体内において所定の搬入方向に沿うとともに前記ウェハがそれぞれ配置される複数のベーススリットを形成する複数のベースガイドと、複数の前記ベースガイドの前記搬入口側に配置され前記スリットを前記搬入口側に延長する複数の延長ガイドと、を備え、前記搬入方向において、ベースガイドで形成されるベーススリットの長さは、前記ウェハの長さより小さく、前記ベースガイドと前記延長ガイドとによって形成されるガイドスリットの合計の長さは前記ウェハの長さより大きい。【選択図】図１ |
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