PIEZOELECTRIC ELEMENT UNIT AND RESONATOR
To provide a piezoelectric element unit suitable for miniaturization and high packaging density, and provide a resonator including the piezoelectric element unit.SOLUTION: A piezoelectric element unit 100 includes a substrate 101 having a main surface 101A, a piezoelectric film 103 disposed on the s...
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Zusammenfassung: | To provide a piezoelectric element unit suitable for miniaturization and high packaging density, and provide a resonator including the piezoelectric element unit.SOLUTION: A piezoelectric element unit 100 includes a substrate 101 having a main surface 101A, a piezoelectric film 103 disposed on the substrate 101 and having a side surface 103A, a side surface 103B opposite to the side surface 103A, and a bottom surface 103C facing the main surface 101A and connected to the side surface 103A and the side surface 103B, an electrode 104a disposed on the substrate 101 and in contact with the side surface 103A of the piezoelectric film 103, and an electrode 104b disposed on the substrate 101, in contact with at least one of the side surfaces 103A and 103B of the piezoelectric film 103, and separated from the electrode 104a.SELECTED DRAWING: Figure 1B
【課題】小型化及び高実装密度化に適した圧電素子ユニットを提供する。また、当該圧電素子ユニットを備えた共振器を提供する。【解決手段】主面101Aを有する基板101と、基板101上に配置され、かつ、側面103A、側面103Aと反対側の側面103B、及び主面101Aと対向し、側面103A及び側面103Bと接続している底面103Cを有する圧電膜103と、基板101上に配置され、かつ、圧電膜103の側面103Aと接している電極104aと、基板101上に配置され、圧電膜103の側面103A及び側面103Bの少なくともいずれかと接し、かつ、電極104aと離隔している電極104bと、を備える圧電素子ユニット100。【選択図】図1B |
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