SUBSTRATE TRANSFER SYSTEM, SUBSTRATE STAGE, EXPOSURE DEVICE, AND ARTICLE MANUFACTURING METHOD

To drive a substrate transfer mechanism without damaging substrates.SOLUTION: Provided is a substrate transfer system that drives a substrate transfer mechanism from an origin position, holds the substrate placed on the top face of a substrate stage with the top face of the substrate transfer mechan...

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Bibliographische Detailangaben

1. Verfasser:	SHIINO KYOTA
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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