SUBSTRATE TRANSFER SYSTEM, SUBSTRATE STAGE, EXPOSURE DEVICE, AND ARTICLE MANUFACTURING METHOD

To drive a substrate transfer mechanism without damaging substrates.SOLUTION: Provided is a substrate transfer system that drives a substrate transfer mechanism from an origin position, holds the substrate placed on the top face of a substrate stage with the top face of the substrate transfer mechanism, transfers the substrate to a prescribed position, driving the substrate transfer mechanism forward in a first path, and returns the substrate transfer mechanism to the origin position, driving the substrate transfer mechanism forward in a second path. The substrate transfer system comprises a detection unit that detects the presence of substrates at the prescribed position, and a control unit that controls the drive of the substrate transfer mechanism. When an error occurs in the substrate transfer system, the control unit determines whether to drive the substrate transfer mechanism backward in the first path so as to drive the substrate transfer mechanism to the origin position, or to drive the substrate transfer mechanism forward in the second path so as to drive the substrate transfer mechanism to the origin position on the basis of the result of detection by the detection unit.SELECTED DRAWING: Figure 3 【課題】 基板を破損させずに基板搬送機構を駆動させること。【解決手段】 基板搬送機構を原点位置から駆動させ、基板ステージの上面に配置された前記基板を前記基板搬送機構の上面で保持し、第１経路を順方向に前記基板搬送機構を駆動させて所定位置に搬送し、第２経路を順方向に前記基板搬送機構を駆動させて、前記基板搬送機構を前記原点位置に戻すように駆動させる基板搬送システムであって、前記所定位置における基板の有無を検出する検出部と、前記基板搬送機構の駆動を制御する制御部と、を有し、前記制御部は、前記基板搬送システムにエラーが生じた際に、前記検出部で検出された結果に基づいて、前記第１経路を逆方向に前記基板搬送機構を駆動させることにより前記基板搬送機構を前記原点位置に駆動させるか、前記第２経路を順方向に前記基板搬送機構を駆動させることにより前記搬送機構を前記原点位置に駆動させるか、を決定する。【選択図】 図３