MANUFACTURING METHOD OF RUTHENIUM-CONTAINING THIN FILM

To provide a manufacturing method capable of more easily manufacturing a ruthenium-containing thin film in a region selective manner by a CVD method or an ALD method.SOLUTION: A manufacturing method of a ruthenium-containing thin film by a CVD method or an ALD method using a ruthenium compound as a...

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Bibliographische Detailangaben
Hauptverfasser:	YAMAMOTO ARINORI, EBIHARA RYOSUKE, HAYAKAWA TEPPEI
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAININGELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN,SULFUR, SELENIUM OR TELLURIUM BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY ORGANIC CHEMISTRY SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	To provide a manufacturing method capable of more easily manufacturing a ruthenium-containing thin film in a region selective manner by a CVD method or an ALD method.SOLUTION: A manufacturing method of a ruthenium-containing thin film by a CVD method or an ALD method using a ruthenium compound as a raw material manufactures the ruthenium-containing thin film in a region selective manner using a ruthenium compound and one or more types of a reduction gas.SELECTED DRAWING: Figure 1 【課題】ＣＶＤ法又はＡＬＤ法により、より簡便に領域選択的にルテニウム含有薄膜を製造することができる、製造方法を提供すること。【解決手段】ルテニウム化合物を原料として使用した、ＣＶＤ法又はＡＬＤ法によるルテニウム含有薄膜の製造方法であって、ルテニウム化合物と１種類以上の還元性ガスとを使用し、領域選択的にルテニウム含有薄膜を製造することを特徴とする、ルテニウム含有薄膜の製造方法により解決する。【選択図】図１