SEMICONDUCTOR STORAGE DEVICE

To provide a semiconductor storage device capable of properly maintaining a positional relationship between a plurality of configurations arranged in a lamination structure.SOLUTION: A semiconductor storage device of an embodiment comprises a plurality of first contacts CCc arranged along a plate-like part LI on one side in a second direction of the plate-like part LI in a stair region SR and connected to each of conductive layers WL of at least a lower layer of a plurality of conductive layers WL processed stepwise of a first stair part SP, and a plurality of second contacts CCc arranged along the plate-like part LI on the other side in the second direction of the plate-like part LI in the step region SR and connected to each of conductive layers WL of at least the lower layer processed stepwise of the first stair part SP. Each of the plurality of first contacts CCc is arranged in a different position in the second direction with respect to the plate-like part LI according to a position in a first direction. Each of the plurality of second contacts CCc is arranged in a position in which arrangement of each of the plurality of first contacts CCc is reversed in the second direction with respect to the plate-like part LI.SELECTED DRAWING: Figure 3 【課題】積層構造中に配置される複数の構成間の位置関係を適正に維持すること。【解決手段】実施形態の半導体記憶装置１は、階段領域ＳＲ内における板状部ＬＩの第２の方向の一方側で板状部ＬＩに沿って配列され、第１の階段部ＳＰの階段状に加工された複数の導電層ＷＬのうち少なくとも下層の導電層ＷＬのそれぞれと接続される複数の第１のコンタクトＣＣｃと、階段領域ＳＲ内における板状部ＬＩの第２の方向の他方側で板状部ＬＩに沿って配列され、第１の階段部ＳＰの階段状に加工された少なくとも下層の導電層ＷＬのそれぞれと接続される複数の第２のコンタクトＣＣｃと、を備え、複数の第１のコンタクトＣＣｃは、第１の方向の位置に応じて、板状部ＬＩに対して第２の方向の異なる位置にそれぞれ配置され、複数の第２のコンタクトＣＣｃは、複数の第１のコンタクトＣＣｃのそれぞれの配置を板状部ＬＩに対して第２の方向に反転させた位置にそれぞれ配置される。【選択図】図３