MAGNETIC FIELD VECTOR SENSOR

To provide a magnetic field vector sensor in which a magnetic field detection element, in which detection magnetic field direction and element direction are parallel, measures a miniature magnetic vector of 1 nT or less in a small range focusing on a GSR sensor, which is an ultra-high sensitivity micro-magnetic sensor with high magnetic field detection capacity.SOLUTION: A magnetic field vector sensor includes: four magnetic field detection elements affixed to an inclined surface with an inclination angle of 20 to 45 degrees, symmetrically and mirror-image object four times in a pedestal with at least four inclined surfaces four-time symmetrically. Using magnetic measurement values Hx1, Hx2, Hy1, and Hy2 of those four elements, magnetic field vectors (Hx,Hy,Hz) at the measurement position is obtained. Hx is obtained by subtracting Hx1 and Hx2, Hy is obtained by subtracting Hy1 and Hy2, and Hz is obtained by adding Hx1, Hx2, Hy1, and Hy2.SELECTED DRAWING: Figure 3A 【課題】検出磁界方向と素子の方向が平行である磁界検出素子は磁界検出能の高い超高感度マイクロ磁気センサであるＧＳＲセンサに着目して、１ｎＴ以下の微小な磁気ベクトルを微小空間範囲で測定する。【解決手段】４個の磁界検出素子を、少なくとも４面の傾斜面を４回対称的に有する台座であって、その傾斜角度２０～４５度の傾斜面よりなる傾斜面に４回対称かつ鏡像対象に貼り付けて、それら４個の素子の磁気測定値Ｈｘ１、Ｈｘ２、Ｈｙ１、Ｈｙ２を使って、ＨｘはＨｘ１とＨｘ２の減算から、ＨｙはＨｙ１とＨｙ２の減算から、そしてＨｚはＨｘ１、Ｈｘ２、Ｈｙ1、Ｈｙ２の加算によって、測定位置における磁界ベクトル（Ｈｘ，Ｈｙ，Ｈｚ）を求められる磁界ベクトルセンサを提供する。【選択図】図３Ａ