SOLID-STATE IMAGING DEVICE, METHOD FOR PRODUCING SOLID-STATE IMAGING DEVICE, AND ELECTRONIC DEVICE
To provide a solid-state imaging device capable of further improving reliability of the solid-state imaging device and further reducing manufacturing cost.SOLUTION: Provide is a solid-state imaging device in which a second semiconductor substrate provided with a photoelectric conversion unit and a s...
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Format: | Patent |
Sprache: | eng ; jpn |
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Zusammenfassung: | To provide a solid-state imaging device capable of further improving reliability of the solid-state imaging device and further reducing manufacturing cost.SOLUTION: Provide is a solid-state imaging device in which a second semiconductor substrate provided with a photoelectric conversion unit and a second element, a second insulating layer, a first semiconductor substrate provided with a first element, and a first insulating layer are arranged in this order from a light incident side, and which has a groove-like part formed on the first semiconductor substrate. The groove-like part has a first side wall and a second side wall, and a part of at least one side wall of the first side wall and the second side wall extends in an oblique direction with respect to a surface of the first semiconductor substrate on the light incident side.SELECTED DRAWING: Figure 3
【課題】固体撮像装置の更なる信頼性の向上や製造コストの更なる抑制を実現することができる固体撮像装置を提供すること。【解決手段】光入射側から順に、光電変換部と第2素子とが設けられた第2半導体基板と、第2絶縁層と、第1素子が設けられた第1半導体基板と、第1絶縁層とが配され、該第1半導体基板に形成された溝状部を有し、該溝状部が第1側壁と第2側壁とを有し、該第1側壁及び該第2側壁のうち少なくとも一方の側壁の一部が、該第1半導体基板の該光入射側の面に対して斜め方向に延在する、固体撮像装置を提供する。【選択図】図3 |
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