CERAMIC HEATER

To provide a ceramic heater which can increase the transient characteristics to heating or cooling in the outer peripheral part of a ceramic base material.SOLUTION: A ceramic heater 100 includes: a disc-like ceramic base material 110; and a heater electrode 122 buried in the ceramic base material 11...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	SHIMOJIMA HIROMASA, KITABAYASHI TETSUO
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC HEATING ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	To provide a ceramic heater which can increase the transient characteristics to heating or cooling in the outer peripheral part of a ceramic base material.SOLUTION: A ceramic heater 100 includes: a disc-like ceramic base material 110; and a heater electrode 122 buried in the ceramic base material 110. The ratio T1/T can be made equal to 0.35 or more, letting T1 denote the total length in a vertical direction 5 of the hollow part of the ceramic base material 110 and letting T denote the length in the vertical direction 5 of the ceramic base material 110.SELECTED DRAWING: Figure 10 【課題】セラミックス基材の外周部分における加熱、冷却に対する過渡特性を向上させることができるセラミックスヒータを提供する。【解決手段】セラミックスヒータ１００は、円板状のセラミックス基材１１０と、セラミックス基材１１０に埋設されたヒータ電極１２２とを備えている。セラミックス基材１１０の、上下方向５の長さＴに対する、中空部分の上下方向５の長さの総和Ｔ１の比Ｔ１／Ｔは０．３５以上にすることができる。【選択図】図１０