LIGHT EXPOSURE DEVICE, AND MANUFACTURING METHOD OF ARTICLE

To provide a light exposure device capable of easily mitigating ununiformity in an integrated exposure value of a connection region.SOLUTION: A light exposure device includes: a shading part movable in a non-scanning direction, including an opening through which exposure light from a light source pa...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SUZUKI TORU, TAZANE SHINYA, HAMAZAKI YASUTAKA
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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