LIGHT EXPOSURE DEVICE, AND MANUFACTURING METHOD OF ARTICLE

To provide a light exposure device capable of easily mitigating ununiformity in an integrated exposure value of a connection region.SOLUTION: A light exposure device includes: a shading part movable in a non-scanning direction, including an opening through which exposure light from a light source passes and a plurality of shape adjustment parts each of which is adjustable of a width in a scanning direction at a prescribed position in the non-scanning direction of the opening; an illumination optical system configured to guide the exposure light to an original plate; and a control part configured to control a relative position in the non-scanning direction between an original plate stage and the opening so as to differentiate: an arrangement in the non-scanning direction of a shape adjustment part included in a first connection region of a first light exposure region when projecting along a light path of the exposure light in exposing the first light exposure region; and an arrangement in the non-scanning direction of a shape adjustment part included in a second connection region in a second light exposure region when projecting along a light path of the exposure light in exposing the second light exposure region, each other.SELECTED DRAWING: Figure 4 【課題】繋ぎ領域の積算露光量における不均一を簡易に低減することができる露光装置を提供する。【解決手段】本発明に係る露光装置は、光源からの露光光が通過する開口と、各々が開口の非走査方向における所定の位置の走査方向における幅を調整可能な複数の形状調整部とを有する、非走査方向に移動可能な遮光部を含み、露光光を原版に導光する照明光学系と、第１の露光領域を露光する際に露光光の光路に沿って投影した場合に第１の露光領域の第１の繋ぎ領域内に含まれる形状調整部の非走査方向における配置と、第２の露光領域を露光する際に露光光の光路に沿って投影した場合に第２の露光領域の第２の繋ぎ領域内に含まれる形状調整部の非走査方向における配置とが互いに異なるように、原版ステージと開口との間の非走査方向における相対位置を制御する制御部とを備えることを特徴とする。【選択図】 図４