PIEZOELECTRIC ELEMENT AND PIEZOELECTRIC DEVICE

To ensure a slit to be properly formed.SOLUTION: With a plurality of vibration regions 22, an interval of each vibration region is separated by a slit 41. The slit 41 is formed in such a state that a tapered unit 42 is constituted that becomes narrower from one surface 22a side opposite to a support...

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Bibliographische Detailangaben
Hauptverfasser:	TANAKA MASAAKI, KOBAYASHI TASUKE, SHIROMORI TOMOYA, SAKAI MINEICHI, ABE RYUICHIRO, KOYAMA YUJI, HIGUCHI TAKAFUMI, MAWATARI KAZUAKI, HAYAKAWA YUTAKA
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	ELECTRICITY MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE PHYSICS TESTING
Online-Zugang:	Volltext bestellen
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Beschreibung
Zusammenfassung:	To ensure a slit to be properly formed.SOLUTION: With a plurality of vibration regions 22, an interval of each vibration region is separated by a slit 41. The slit 41 is formed in such a state that a tapered unit 42 is constituted that becomes narrower from one surface 22a side opposite to a support 10 side in the vibration region 22 toward the other surface 22b side opposite to the one surface 22a. An electrode film 60 is arranged inside the slit 41 in a normal direction relative to the surface 22a. An angle θ1 defined by a side surface 22c constituting the tapered unit 42 in the vibration region 22 and the surfaces 22a, Sv in parallel to the surface 22a is set to be 39 to 81°.SELECTED DRAWING: Figure 1 【課題】スリットが適切に形成されるようにする。【解決手段】複数の振動領域２２は、互いの振動領域の間がスリット４１で分離され、スリット４１は、振動領域２２における支持体１０側と反対側の一面２２ａ側から当該一面２２ａと反対側の他面２２ｂ側に向かって幅が狭くなるテーパ部４２が構成される状態で形成されるようにする。電極膜６０は、一面２２ａに対する法線方向において、スリット４１よりも内側に配置されるようにし、振動領域２２におけるテーパ部４２を構成する側面２２ｃと、一面２２ａと平行な面２２ｂ、Ｓｖとの成す角度θ１が３９～８１°となるようにする。【選択図】図１