WORK DIVISION DEVICE AND WORK DIVISION METHOD
To provide a work division device and a work division method, capable of effectively removing a slacking due to a plastic deformation of a dicing tape generated after expanding.SOLUTION: A work division device comprises: an expansion step of expanding a dicing tape 3; a heating step of thermally con...
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| Format: | Patent |
| Sprache: | eng ; jpn |
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| Zusammenfassung: | To provide a work division device and a work division method, capable of effectively removing a slacking due to a plastic deformation of a dicing tape generated after expanding.SOLUTION: A work division device comprises: an expansion step of expanding a dicing tape 3; a heating step of thermally contracting the dicing tape 3; and an expansion state holding step of holding an expansion state of the dicing tape 3 to be thermally contracted.SELECTED DRAWING: Figure 7
【課題】エキスパンド後に生じたダイシングテープの塑性変形による弛みを有効に除去することができるワーク分割装置及びワーク分割方法を提供する。【解決手段】ダイシングテープ３を拡張する拡張工程と、ダイシングテープ３を熱収縮させる加温工程と、熱収縮されたダイシングテープ３の拡張状態を保持する拡張状態保持工程と、を備える。【選択図】図７ |
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