BROAD ION BEAM (BIB) SYSTEM FOR MORE EFFICIENT PROCESSING OF MULTIPLE SAMPLES

BROAD ION BEAM (BIB) SYSTEM FOR MORE EFFICIENT PROCESSING OF MULTIPLE SAMPLES

To disclose a system and a method for operating a broad ion beam (BIB) polisher in a sample preparation workflow having improved uptime.SOLUTION: An exemplary method for operating a broad ion beam (BIB) polisher having improved uptime according to the present invention comprises: causing a first BIB...

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Hauptverfasser: LIBOR NOVAK, MICHAL HROUZEK, PETR WANDROL, KRISHNA KANTH NEELISETTY
Format: Patent
Sprache:eng ; jpn
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
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creator LIBOR NOVAK
MICHAL HROUZEK
PETR WANDROL
KRISHNA KANTH NEELISETTY
description To disclose a system and a method for operating a broad ion beam (BIB) polisher in a sample preparation workflow having improved uptime.SOLUTION: An exemplary method for operating a broad ion beam (BIB) polisher having improved uptime according to the present invention comprises: causing a first BIB source to emit a first broad ion beam toward a sample disposed within an internal volume of the BIB polisher while the first BIB source is emitting the first broad ion beam toward the sample; and removing, from the BIB polisher, a second BIB source configured to emit, in use, a second broad ion beam toward the sample.SELECTED DRAWING: Figure 1 【課題】 改善された稼働時間を有する試料準備ワークフローにおいてブロードイオンビーム（ＢＩＢ）研磨機を動作させるためのシステム及び方法が開示される。【解決手段】 本発明による改善された稼働時間を有するブロードイオンビーム（ＢＩＢ）研磨機を動作させるための例示的な方法は、第１のＢＩＢソースが試料に向かって第１のブロードイオンビームを放出している間に、第１のＢＩＢソースに、ＢＩＢ研磨機の内部容積内に配置された試料に向かって第１のブロードイオンビームを放出させることと、使用時に、試料に向かって第２のブロードイオンビームを放出するように構成された第２のＢＩＢソースをＢＩＢ研磨機から除去することと、を含む。【選択図】 図１
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
title BROAD ION BEAM (BIB) SYSTEM FOR MORE EFFICIENT PROCESSING OF MULTIPLE SAMPLES
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