X-RAY DIFFRACTION MEASUREMENT METHOD AND X-RAY DIFFRACTION MEASUREMENT DEVICE

X-RAY DIFFRACTION MEASUREMENT METHOD AND X-RAY DIFFRACTION MEASUREMENT DEVICE

To enable stable X-ray diffraction measurement of fine crystal grains.SOLUTION: An X-ray diffraction measurement method has: a search step of searching for a fine crystal grain having a crystal plane (SC) extending along a substrate surface from among multiple fine crystal grains (CP) disposed on th...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: SUGAWARA TAKETO, WATANUKI TORU, MACHIDA AKIHIKO, OWADA KENJI, OSHIME NORIHIRO
Format: Patent
Sprache:eng ; jpn
Schlagworte:
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:To enable stable X-ray diffraction measurement of fine crystal grains.SOLUTION: An X-ray diffraction measurement method has: a search step of searching for a fine crystal grain having a crystal plane (SC) extending along a substrate surface from among multiple fine crystal grains (CP) disposed on the substrate surface (SF) of a substrate (SB0); and a measurement step of making X-ray diffraction measurement of the searched fine crystal grain.SELECTED DRAWING: Figure 1 【課題】微小結晶粒の安定的なＸ線回折測定を実現する。【解決手段】Ｘ線回折測定方法は、基板（ＳＢ０）の基板面（ＳＦ）上に配置される複数の微小結晶粒（ＣＰ）から、前記基板面に沿う結晶面（ＳＣ）を有する微小結晶粒を探索する探索工程と、前記探索された微小結晶粒をＸ線回折測定する測定工程と、を有する。【選択図】図１