FLOW CONTROLLER

To provide a flow controller that can prevent overshoot while improving responsiveness at the start of flow control.SOLUTION: A flow controller 1 according to the present invention comprises: a flow meter 2 that measures the flow rate of fluid flowing in a channel 8; a flow control valve 4 that adju...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	TAMURA BUNICHI, TOBIMATSU SHINJI, YAMAMOTO KENJI, NAKAMURA MASATOSHI
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	CONTROLLING PHYSICS REGULATING SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!