FLOW CONTROLLER

To provide a flow controller that can prevent overshoot while improving responsiveness at the start of flow control.SOLUTION: A flow controller 1 according to the present invention comprises: a flow meter 2 that measures the flow rate of fluid flowing in a channel 8; a flow control valve 4 that adjusts the flow rate of the fluid flowing in the channel 8; and a control unit 7 that controls the degree of opening of the flow control valve 4 based on a result of measurement performed by the flow meter 2. The flow controller has a low flow rate rapid valve open function to, when the degree of opening of the flow control valve 4 is full close and at the start of flow control, forcibly open the flow control valve 4 from the degree of opening at full close to a designated degree of opening to advance the start of flow of the fluid, and an overshoot prevention function to, immediately after the operation of the low flow rate rapid valve open function, standby for the flow control until a preset standby time is reached or a preset flow rate threshold is reached to prevent overshoot.SELECTED DRAWING: Figure 1 【課題】流量制御開始時の応答性を改善しつつ、オーバーシュートを抑制することが可能な流量制御装置を提供する。【解決手段】本発明に係る流量制御装置１は、流路８を流れる流体の流量を測定する流量計２と、流路８を流れる流体の流量を調節する流量調節弁４と、流量計２の測定結果に基づき流量調節弁４の開度を制御する制御部７と、を備え、流量調節弁４の開度が全閉で、かつ、流量制御を開始した時点で、流量調節弁４の開度を全閉から指定開度まで強制的に開くことにより流体の流れ出しを早める低流量急速バルブオープン機能と、低流量急速バルブオープン機能の動作直後に、予め設定された待機時間に到達するか、又は、予め設定された流量閾値に到達するまで流量制御を待機させることによりオーバーシュートを抑制するオーバーシュート抑制機能と、を有する。【選択図】図１