THERMAL MANAGEMENT SYSTEMS AND DEVICES FOR CABINETS USED IN SEMICONDUCTOR FABRICATION PROCESSING

To provide thermal management systems and devices for cabinets used in semiconductor fabrication processing.SOLUTION: Cabinets used in semiconductor fabrication processes comprise a housing with an internal space having a storage vessel disposed therein, the storage vessel containing a material used...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SUDHANSHU BIYANI, ANKIT KIMTEE
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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