ANGULAR DISPLACEMENT MEASUREMENT DEVICE AND ANGULAR DISPLACEMENT MEASUREMENT METHOD

To increase measurement resolution to acquire an angular displacement of an object with high accuracy.SOLUTION: An angular displacement measurement device comprises: an irradiation unit that irradiates light toward an object; a detection unit that detects reflection light that is emitted from the ir...

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Bibliographische Detailangaben
Hauptverfasser:	MATSUKUMA HIRAKU, KO ISAMU, SHIMIZU HIROKI, SATO RYO, SHIN DONG WOOK
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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Beschreibung
Zusammenfassung:	To increase measurement resolution to acquire an angular displacement of an object with high accuracy.SOLUTION: An angular displacement measurement device comprises: an irradiation unit that irradiates light toward an object; a detection unit that detects reflection light that is emitted from the irradiation unit and is reflected from the object, and transmission light that is emitted from the irradiation unit and has transmitted the object; and a processing unit that obtains an angular displacement of the object based on a ratio between the intensity of the detected reflection light and the intensity of the detected transmission light.SELECTED DRAWING: Figure 2 【課題】測定分解能を高め、対象物の角度変位を高い精度にて取得する。【解決手段】角度変位測定装置は、対象物に向けて光を照射する照射部と、前記照射部から照射された光であって前記対象物から反射された反射光と、前記照射部から照射された光であって前記対象物を透過した透過光と、を検出する検出部と、前記検出された反射光の強度と前記検出された透過光の強度との比に基づいて前記対象物の角度変位を取得する処理部と、を備える。【選択図】図２