GAS SENSOR AND METHOD OF MANUFACTURING THE SAME
To provide a gas sensor which may offer improved response.SOLUTION: A gas sensor 10 is provided, comprising an electrode unit 50 with one or more electrode pairs 70, each consisting of a first electrode 71 and a second electrode 72 facing each other in a first direction via a gap, a sensitive film 6...
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Sprache: | eng ; jpn |
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Zusammenfassung: | To provide a gas sensor which may offer improved response.SOLUTION: A gas sensor 10 is provided, comprising an electrode unit 50 with one or more electrode pairs 70, each consisting of a first electrode 71 and a second electrode 72 facing each other in a first direction via a gap, a sensitive film 60 provided between the first electrode 71 and the second electrode 72 of each electrode pair 70, and a voltage application unit 80 configured to apply voltage to the electrode unit 50 across the first electrode 71 side and the second electrode 72 side. The sensitive film 60 is a dense body.SELECTED DRAWING: Figure 1
【課題】応答性を向上させ得るガスセンサを提供する。【解決手段】ガスセンサ10は、第1電極71及び第2電極72を有する電極対70を1つ以上備え、電極対70において第1電極71と第2電極72とが間隙を介して第1方向に対向してなる電極部50と、電極対70における第1電極71と第2電極72との間に配される感応膜60と、電極部50に対して第1電極71側と第2電極72側との間に電圧を印加する電圧印加部80と、を備えている。感応膜60は、緻密体である。【選択図】図1 |
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