STIRRING APPARATUS AND VAPOR DEPOSITION APPARATUS

To provide a stirring apparatus that can effectively crush an aggregate of powder grains in a decompressed atmosphere, and to provide a vapor deposition apparatus including such stirring apparatus.SOLUTION: A stirring apparatus 1 includes: a container 10 for storing powder; a rotary vane 20 installe...

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Bibliographische Detailangaben
Hauptverfasser:	SATAKOKU SHINJI, FURUSE HARUKUNI, IZAWA YORIAKI, IKEDA HIROYUKI, FUKUHARA ATSUSHI
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY MIXING, e.g. DISSOLVING, EMULSIFYING, DISPERSING PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TRANSPORTING
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Beschreibung
Zusammenfassung:	To provide a stirring apparatus that can effectively crush an aggregate of powder grains in a decompressed atmosphere, and to provide a vapor deposition apparatus including such stirring apparatus.SOLUTION: A stirring apparatus 1 includes: a container 10 for storing powder; a rotary vane 20 installed inside the container 10 and rotating about a first rotation axis AX1 oriented in a vertical direction; and one or more rotors 30 rotating within an upper range relative to a range where the rotary vane 20 rotates inside the container 10. The range where the rotary vane 20 rotates includes a range in the vicinity of an inner surface 10a of the container 10. With the rotation of the rotors 30, an aggregate of powder grains included in the powder inside the container 10 is crushed.SELECTED DRAWING: Figure 2 【課題】減圧雰囲気で粉体粒子の凝集物を効果的に解砕させることができる攪拌装置と、そのような攪拌装置を備えた蒸着装置を提供する。【解決手段】攪拌装置１は、粉体を収容する容器１０と、容器１０の内側に設けられ、鉛直方向を向いた第１回転軸ＡＸ１のまわりを回転する回転羽根２０と、容器１０の内側において回転羽根２０が回転する範囲より上方の範囲において回転する１つ以上の回転体３０とを有する。回転羽根２０が回転する範囲は、容器１０の内面１０ａに近接した範囲を含んでいる。回転体３０の回転に伴って、容器１０内の粉体に含まれた粉体粒子の凝集物が解砕される。【選択図】図２