MAGNETIC SENSOR
To provide a magnetic sensor capable of detecting a weak magnetic field.SOLUTION: A magnetic sensor according to the present invention comprises: a magneto-resistive element 10 that has a multilayer film in which a first magnetic layer 102, a non-magnetic layer 103 and a second magnetic layer 104 ar...
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Zusammenfassung: | To provide a magnetic sensor capable of detecting a weak magnetic field.SOLUTION: A magnetic sensor according to the present invention comprises: a magneto-resistive element 10 that has a multilayer film in which a first magnetic layer 102, a non-magnetic layer 103 and a second magnetic layer 104 are sequentially laminated, and which includes a plurality of lateral vanes 10a, 10c provided on in-plane side edges in a direction (second direction) in-plane orthogonal to an energization pivot part 10b and the energization direction (first direction) of the energization pivot part 10b, and which are separated by an insulating or high-resistance region along the energization direction; and a pair of magnetic flux convergence magnetic substance layers 11a, 11b that are respectively arranged on both sides of the energization pivot part 10b along an in-plane orthogonal direction (second direction), the magnetic flux convergence magnetic substance layers 11a, 11b having regions that overlap the lateral vanes 10a, 10c in the film thickness direction of the magneto-resistive element 10 (third direction orthogonal to the first and second directions).SELECTED DRAWING: Figure 1
【課題】微弱な磁界が検出できる磁気センサを提供すること。【解決手段】本発明の磁気センサは、第1の磁性層102、非磁性層103及び第2の磁性層104を順次積層した多層膜を有する磁気抵抗素子10であって、通電枢軸部10bと当該通電枢軸部10bの通電方向(第1方向)と面内直交する方向(第2方向)の面内側縁に設けられ且つ前記通電方向に沿って絶縁または高抵抗の領域で隔てられた複数の側方翼部10a、10cとを備える磁気抵抗素子10と、通電枢軸部10bの面内直交する方向(第2方向)に沿った両側にそれぞれ配置した一対の磁束収束磁性体層11a、11bであって、磁束収束磁性体層11a、11bは磁気抵抗素子10の膜厚方向(第1、第2方向と直交する第3方向)に、側方翼部10a、10cと重なる部位を有するものである。【選択図】図1 |
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