ALUMINUM NITRIDE SINTERED BODY
To provide an aluminum nitride sintered body having high thermal conductivity and a high volume resistivity.SOLUTION: An aluminum nitride sintered body disclosed by the present specification includes: a composite oxide that is composed mainly of aluminum nitride and contains a rare earth element and...
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Format: | Patent |
Sprache: | eng ; jpn |
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Zusammenfassung: | To provide an aluminum nitride sintered body having high thermal conductivity and a high volume resistivity.SOLUTION: An aluminum nitride sintered body disclosed by the present specification includes: a composite oxide that is composed mainly of aluminum nitride and contains a rare earth element and aluminum; and zirconium nitride. In the aluminum nitride sintered body, a thermal conductivity at 25°C is 150 W/m K or more, a thermal conductivity at 600°C is 60 W/m K or more, and a volume resistivity at 600°C is 1.0×109 Ω cm or more and 1.0×1012 Ω cm or less.SELECTED DRAWING: None
【課題】高い熱伝導性と高い体積抵抗率を有する窒化アルミニウム焼結体を提供する。【解決手段】本明細書によって開示される窒化アルミニウム焼結体は、窒化アルミニウムを主成分とし、希土類元素とアルミニウムとを含む複合酸化物と、窒化ジルコニウムと、を含み、25℃における熱伝導率が150W/m・K以上であり、600℃における熱伝導率が60W/m・K以上であり、かつ、600℃における体積抵抗率が1.0×109Ω・cm以上1.0×1012Ω・cm以下である。【選択図】なし |
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