MOUNTING STAND, AND SURFACE TREATMENT DEVICE
To provide a mounting stand and a surface treatment device, capable of shortening a treatment time required for surface treatment and improving the accuracy of the surface treatment.SOLUTION: The mounting stand for use in surface treatment of an object to be treated, comprising a non-conductive pede...
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Format: | Patent |
Sprache: | eng ; jpn |
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Zusammenfassung: | To provide a mounting stand and a surface treatment device, capable of shortening a treatment time required for surface treatment and improving the accuracy of the surface treatment.SOLUTION: The mounting stand for use in surface treatment of an object to be treated, comprising a non-conductive pedestal and conductive energizing units. The pedestal includes a mounting face on which the object to be treated can be mounted, and the energizing units are attached to the pedestal so that the energizing units can be electrically connected to the object to be treated. The energizing units each extend from the mounting face in the direction of the opposing face of the mounting face.SELECTED DRAWING: Figure 1A
【課題】表面処理に要する処理時間を短くし、表面処理の精度を向上できる載置台及び表面処理装置。【解決手段】被処理物の表面処理に使用する載置台であって、非導電性の台座部と、導電性の通電部とを備え、前記台座部は、前記被処理物を載置可能な載置面を含み、前記通電部は、前記被処理物に対して電気的に接続されるよう、前記台座部に取り付けられている。前記通電部は、前記載置面から前記載置面の対向面に延在している。【選択図】図1A |
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