SEMICONDUCTOR INSPECTION DEVICE AND SEMICONDUCTOR INSPECTION METHOD

To provide a semiconductor inspection device and a semiconductor inspection method capable of performing a contact check without separately mounting a circuit or a component for the contact check.SOLUTION: A semiconductor inspection device inspects an element to be measured 1 having a capacitance between a first electrode and a second electrode. The semiconductor inspection device includes: a first measurement terminal 4 for contacting a first electrode; a second measurement terminal 5 for contacting a second electrode; a power supply part 7 for applying a voltage square wave between the first measurement terminal 4 and the second measurement terminal 5; a differential probe 8 for measuring a voltage signal that is a potential difference between the first measurement terminal 4 and the second measurement terminal 5; a waveform measuring instrument 9 for converting the voltage signal into voltage waveform data by analog-to-digital conversion; and an analysis part 11 for analyzing the voltage waveform data and determining whether the contacts between the first measurement terminal 4 and the second measurement terminal 5 are normal.SELECTED DRAWING: Figure 1 【課題】コンタクトチェック用の回路又は部品を別途搭載することなくコンタクトチェックを実施できる半導体検査装置及び半導体検査方法を得る。【解決手段】半導体検査装置は第１の電極と第２の電極との間に容量を有する被測定素子１を検査する。半導体検査装置は、第１の電極にコンタクトするための第１の測定端子４と、第２の電極にコンタクトするための第２の測定端子５と、第１の測定端子４と第２の測定端子５との間に電圧矩形波を印加する電源部７と、第１の測定端子４と第２の測定端子５の電位差である電圧信号を計測する差動プローブ８と、電圧信号をアナログ・デジタル変換して電圧波形データに変換する波形測定器９と、電圧波形データを波形解析して、第１の測定端子４及び第２の測定端子５のコンタクトが正常か否かの判定をする解析部１１とを備える。【選択図】図１