HOLDING PAD AND TRANSPORT DEVICE

To provide a holding pad which is excellent in retainability for a workpiece having irregularities on an upper surface and a workpiece having a small thickness, and to provide a transport device.SOLUTION: A holding pad (40) suctions and holds an upper surface of a workpiece (W) and includes: a suction plate (41) having a suction surface (44) which suctions and holds the upper surface of the workpiece; a suction passage (45) which is formed within the suction plate and allows the suction surface to communicate with a suction source (46); and a plate-like ring elastic plate (70) which is disposed at an outer peripheral edge of the suction plate in a ring shape spreading toward its bottom; and a ring nozzle (60) which is disposed at the outer side of the ring elastic plate in a horizontal direction and supplies water to the ring shape.SELECTED DRAWING: Figure 6 【課題】上面に凹凸があるワークや、厚みの小さいワークに対する保持性に優れる保持パッド及び搬送装置を提供する。【解決手段】ワーク（Ｗ）の上面を吸引保持する保持パッド（４０）であって、ワークの上面を吸引保持する吸引面（４４）を有する吸引板（４１）と、吸引板の内部に形成し吸引面を吸引源（４６）に連通する吸引路（４５）と、吸引板の外周縁にリング状に末広がり形状で配置する板状のリング弾性板材（７０）と、水平方向でリング弾性板材の外側に配置しリング状に水を供給するリングノズル（６０）と、を備える。【選択図】図６