SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

To suppress local polishing in the manufacturing process of semiconductor devices.SOLUTION: A semiconductor device has a base substrate B including a wiring layer, and chips C1, C2, C3, C4, C5, and C6 on the base substrate B, and electrodes and protective film P are provided between the chips C1, C2...

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Hauptverfasser: HONGO SATOSHI, UDA TATSUO, TOYODA GEN
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creator HONGO SATOSHI
UDA TATSUO
TOYODA GEN
description To suppress local polishing in the manufacturing process of semiconductor devices.SOLUTION: A semiconductor device has a base substrate B including a wiring layer, and chips C1, C2, C3, C4, C5, and C6 on the base substrate B, and electrodes and protective film P are provided between the chips C1, C2, C3, C4, C5, and C6, and the protective film P is also provided on the sides.SELECTED DRAWING: Figure 1 【課題】半導体装置の製造工程における局所研磨を抑制する。【解決手段】半導体装置であって、配線層を含むベース基板Bと、ベース基板B上に設けられたチップC1,C2,C3,C4,C5,C6と、を備え、チップC1,C2,C3,C4,C5,C6間に電極及び保護膜Pが設けられ、側面にも保護膜Pが設けられている。【選択図】図1
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
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