CLEANING DEVICE, VACUUM COOLING DEVICE, AND METHOD FOR CLEANING

To provide a technology that can properly clean a vacuum tube.SOLUTION: A cleaning device for a vacuum cooling device includes: a processing tank with an internal space to dispose an object to be cooled therein; a vacuum device for sucking a gas from the internal space via a vacuum tube; and a suppl...

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1. Verfasser: KOIDE TOORU
Format: Patent
Sprache:eng ; jpn
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Zusammenfassung:To provide a technology that can properly clean a vacuum tube.SOLUTION: A cleaning device for a vacuum cooling device includes: a processing tank with an internal space to dispose an object to be cooled therein; a vacuum device for sucking a gas from the internal space via a vacuum tube; and a supply device for supplying water and air to the vacuum tube.SELECTED DRAWING: Figure 2 【課題】真空管を適切に洗浄できる技術を提供すること。【解決手段】冷却対象が配置される内部空間を有する処理槽と、真空管を介して内部空間の気体を吸引する真空装置と、を備える真空冷却装置のクリーニング装置であって、真空管に水及び空気を供給する供給装置と、を備えるクリーニング装置を提供する。【選択図】図2