PROBE SHEET AND METHOD OF MANUFACTURING THE SAME

To provide a probe sheet that comprises a probe which can be pressed into contact with a ball type bump stably and properly with a proper upward/downward movement margin.SOLUTION: A probe sheet comprises a through electrode which is formed of a through hole penetrating the sheet between top and reverse sides, a through slit which penetrates the sheet between the top and reverse sides while surrounding a circumference of the through electrode annularly in plan view, an upward/downward moving probe which is disconnected from a sheet body through the through slit, and a guide hole which surrounds the upward/downward moving probe through the through slit. While the upward/downward moving probe has a swelling corner part, formed of a first tapered surface and a second tapered surface, on a side surface, the guide hole has a receiving corner part, formed on a third tapered surface opposed to the first tapered surface and a fourth tapered surface opposed to the second tapered surface, on an inner wall, the receiving corner part and the swelling corner part allow the upward/downward probe to move up and down while stopping it from coming out.SELECTED DRAWING: Figure 1 【課題】 適度な上下動代を備え、安定的に且つ適切にボール形バンプと加圧接触できるプローブを備えたプローブシートの提供。【解決手段】 本発明に係るプローブシートは、シート上下面間を貫通する貫通孔で構成する貫通電極と、該貫通電極の周囲を平面視環状に包囲しつつシート上下面間を貫通する貫通スリットと、該貫通スリットを介してシート本体から切り離された上下動プローブと、同貫通スリットを介して上記上下動プローブを包囲するガイド孔を備え、上記上下動プローブは、第一テーパー面と第二テーパー面で構成する膨出角部を側面に有する一方、上記ガイド孔は、上記第一テーパー面に対向する第三テーパー面と上記第二テーパー面に対向する第四テーパー面とで構成する受入角部を内壁に有し、該受入角部及び上記膨出角部により上記上下動プローブの抜け止めを図りつつ上下動を許容する。【選択図】 図１