INSPECTION DEVICE

To provide an inspection device capable of inspecting an inspection object positioned in a lower layer of a hardly permeable material.SOLUTION: An inspection device includes: a light source for outputting pulse excitation light having a time width from 10 picoseconds to 10 nanoseconds; a nonlinear o...

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Bibliographische Detailangaben
Hauptverfasser:	KAJIKAWA KEISUKE, NAWATA KOJI, YAMAMOTO SHUSAKU, MINAMIDE YASUTSUGU, KAMINO YUICHIRO
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING FREQUENCY-CHANGING INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING NON-LINEAR OPTICS OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL LOGIC ELEMENTS OPTICS PHYSICS TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF TESTING
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Beschreibung
Zusammenfassung:	To provide an inspection device capable of inspecting an inspection object positioned in a lower layer of a hardly permeable material.SOLUTION: An inspection device includes: a light source for outputting pulse excitation light having a time width from 10 picoseconds to 10 nanoseconds; a nonlinear optical crystal for generating a terahertz wave by the optical wavelength conversion of the excitation light; and a detector for detecting a reflected wave of the terahertz wave reflected by the object to be inspected.SELECTED DRAWING: Figure 1 【課題】難透過材料の下層に位置する検査対象物を検査できる検査装置を提供する。【解決手段】検査装置は、時間幅が１０ピコ秒から１０ナノ秒のパルス励起光を出力する光源と、前記励起光の光波長変換によってテラヘルツ波を発生する非線形光学結晶と、前記テラヘルツ波が検査対象物で反射した反射波を検出する検出器とを備える。【選択図】図１