METHOD FOR MANUFACTURING PLATE-SHAPED SINTERED BODY

To provide a method for manufacturing a plate-shaped sintered body by which multiple sputtering targets can be manufactured by slicing smoothly without causing cracks in the sintered body formed by a hot isostatic pressing method, even in the case of manufacturing the sputtering targets made of brit...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	OKANO SUSUMU, SUGIUCHI YUKIYA
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	ARTIFICIAL STONE CASTING CEMENTS CERAMICS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDINGMATERIALS CONCRETE DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL LIME, MAGNESIA MAKING METALLIC POWDER MANUFACTURE OF ARTICLES FROM METALLIC POWDER METALLURGY PERFORMING OPERATIONS POWDER METALLURGY REFRACTORIES SLAG SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TRANSPORTING TREATMENT OF NATURAL STONE WORKING METALLIC POWDER
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	To provide a method for manufacturing a plate-shaped sintered body by which multiple sputtering targets can be manufactured by slicing smoothly without causing cracks in the sintered body formed by a hot isostatic pressing method, even in the case of manufacturing the sputtering targets made of brittle materials.SOLUTION: A method for producing a plate-shaped sintered body according to the present invention includes: a sintered body forming process, in which a block-shaped sintered body made of powder material is formed by a hot isostatic pressing method; a slicing process, in which the sintered body is sliced into plate-shaped pieces to form target blanks; and a machining process, in which the target blanks are machined to form sputtering targets, wherein the Vickers hardness of the surface of the sintered body is 130HV to 550HV.SELECTED DRAWING: Figure 2 【課題】脆性材料からなるスパッタリングターゲットを製造する場合でも、熱間等方圧加圧法により形成した焼結体に割れを生じさせることなく、円滑にスライスして複数枚のスパッタリングターゲットを製造することができる板状焼結体の製造方法を提供する。【解決手段】熱間等方圧加圧法により粉末材料からなるブロック状の焼結体を形成する焼結体形成工程と、焼結体を板状にスライスして複数枚のターゲット用素板を形成するスライス工程と、ターゲット用素板を機械加工してスパッタリングターゲットを形成する機械加工工程と、を有し、焼結体の表面のビッカース硬度が１３０ＨＶ以上５５０ＨＶ以下である。【選択図】図２