PLASMA POTENTIAL SENSOR

To provide a plasma potential sensor capable of increasing the detection accuracy of plasma potential.SOLUTION: A plasma potential sensor 10 is configured to be installed on the inner wall of a chamber 103 of plasma processing equipment 100 for detecting the potential of plasma generated in the chamber 103. The plasma potential sensor includes: a first main surface 11 attached to the inner wall of the chamber 103; a second main surface 12 facing the plasma when in use; a plate-shaped conductive detection electrode 13; an electronic circuit 18 placed in the first main surface 11 side rather than the detection electrode 13 and that processes electrical signal detected by detection electrode 13, which has an input terminal 18a where electrical signals are input and an output terminal 18b that outputs processing results; a connection part 23 that electrically connects the detection electrode 13 and the input terminal 18a; a signal leader line 14 electrically connected to the output terminal 18b; and a protective layer 15 that has insulation properties and covers the detection electrode 13, the electronic circuit 18, and the signal leader line 14.SELECTED DRAWING: Figure 2 【課題】プラズマ電位の検出精度を高める。【解決手段】プラズマ処理装置１００のチャンバ１０３の内壁に取り付け可能に構成され、チャンバ１０３内で生成されるプラズマの電位を検出するプラズマ電位センサ１０は、チャンバ１０３の内壁に取り付けられる第１主面１１と、使用時にプラズマに対向する第２主面１２と、導電性を有する板状の検出電極１３と、検出電極１３よりも第１主面１１側に設けられかつ検出電極１３で検出された電気信号を処理する電子回路１８であって、電気信号が入力される入力端子１８ａおよび処理結果を出力する出力端子１８ｂを有する電子回路１８と、検出電極１３と入力端子１８ａとを電気的に接続する接続部２３と、出力端子１８ｂに電気的に接続された信号引出線１４と、絶縁性を有すると共に、検出電極１３、電子回路１８、および信号引出線１４を被覆する保護層１５と、を備える。【選択図】図２