IMMERSION INSPECTION DEVICE, INSPECTION METHOD FOR IMMERSION INSPECTION DEVICE, AND PROGRAM
To reduce the workload in installing various devices including a laser irradiator.SOLUTION: An immersion inspection device comprises: a laser irradiation unit that irradiates a bottom face of an air break switch with a laser; a photographing unit that performs photographing in the irradiation direct...
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Format: | Patent |
Sprache: | eng ; jpn |
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