DETECTOR AND HEAT TREATMENT DEVICE

To provide a detector normally operating even at the inside of a chamber made into a high temperature upon heat treatment.SOLUTION: A detector 50 is provided at the inside of a chamber heat-treating a workpiece and pressed by the workpiece conveyed into the chamber, and comprises: a cathode wire 521...

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Hauptverfasser: ISHIHARA JUNJI, ISO AKINORI
Format: Patent
Sprache:eng ; jpn
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Beschreibung
Zusammenfassung:To provide a detector normally operating even at the inside of a chamber made into a high temperature upon heat treatment.SOLUTION: A detector 50 is provided at the inside of a chamber heat-treating a workpiece and pressed by the workpiece conveyed into the chamber, and comprises: a cathode wire 521 made of metal; an anode wire 522 provided so as to be separated from the cathode wire 521 and made of metal different from the cathode wire 521; and a detection unit 54 bringing one end of the cathode wire 521 into conduction with one end of the anode wire 522 by being pressed by the workpiece. The other end of the cathode wire 521 and the other end of the anode wire 522 are provided outside the chamber.SELECTED DRAWING: Figure 6 【課題】熱処理時に高温となるチャンバの内部においても正常に動作する検出器を提供する。【解決手段】ワークを熱処理するチャンバの内部に設けられ、チャンバの内部に搬入されるワークに押圧される検出器50であって、金属からなる正極線521と、正極線521から離間して設けられ、正極線521と異なる金属からなる負極線522と、ワークに押圧されることにより正極線521の一端と負極線522の一端とを導通させる検出部54と、を備え、正極線521の他端と負極線522の他端とが、チャンバの外側に設けられていることを特徴とする。【選択図】図6