THREE-DIMENSIONAL SHAPE MEASURING DEVICE AND REFERENCE SURFACE POSITION ADJUSTMENT METHOD FOR THE SAME

To provide a three-dimensional shape measuring device that can match a measured optical path length and a reference optical path length with each other with high accuracy at low cost regardless of the temperature of an installation environment, and a reference surface position adjustment method for the same.SOLUTION: A three-dimensional shape measuring device comprises: a light source unit that emits measuring light being white light; an interference unit that divides part of the measuring light emitted by the light source unit as reference light, emits the measuring light to a surface to be measured and emits the reference light to a reference surface, and generates interference light between the measuring light returning from the surface to be measured and the reference light returning from the reference surface; a holder that accommodates the interference unit and the reference surface, the holder formed of a material that is thermally deformed reversibly according to a change in temperature and changing a reference optical path length that is the optical path length of the reference light between the interference unit and the reference surface according to the change in temperature; and a temperature adjustment unit that, when the optical path length between the interference unit and the surface to be measured is a measured optical path length, adjusts the temperature of the holder to be a target temperature at which the reference optical path length matches the measured optical path length.SELECTED DRAWING: Figure 5 【課題】設置環境温度に関係なく、低コストで測定光路長と参照光路長とを高精度に一致させられる三次元形状測定装置、及びその参照面位置調整方法を提供する。【解決手段】白色光である測定光を出射する光源部と、光源部より出射された測定光から測定光の一部を参照光として分割し、測定光を被測定面に出射し且つ参照光を参照面に出射して、被測定面から戻る測定光と参照面から戻る参照光との干渉光を生成する干渉部と、干渉部及び参照面を収納するホルダであって、温度変化に応じて可逆的に熱変形する材料で形成されており、温度変化に応じて干渉部と参照面との間の参照光の光路長である参照光路長を変化させるホルダと、干渉部と被測定面との間の測定光の光路長を測定光路長とした場合に、ホルダの温度を、参照光路長が測定光路長に一致する目標温度に調整する温度調整部と、を備える。【選択図】図５