SUBSTRATE PROCESSING SYSTEM AND CONVEYING METHOD

To provide a substrate processing system and a conveying method for selectively replacing consumable members having different replacement timings.SOLUTION: A plasma processing apparatus 1 comprises: a vacuum conveying module; a plasma processing module connected with the vacuum conveying module; and...

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Bibliographische Detailangaben
Hauptverfasser: AMIKURA NORIHIKO, PARK GYEONG-MIN, KITA MASATOMO, MATSUURA SHIN, SASAKI NOBUMINE, MAKABE AKIYUKI
Format: Patent
Sprache:eng ; jpn
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Zusammenfassung:To provide a substrate processing system and a conveying method for selectively replacing consumable members having different replacement timings.SOLUTION: A plasma processing apparatus 1 comprises: a vacuum conveying module; a plasma processing module connected with the vacuum conveying module; and a control unit 90. The plasma processing module includes a plasma processing chamber 10, a stage that is arranged in the plasma processing chamber and has a substrate support surface and a ring support surface, a cover ring CR that is arranged on the ring support surface of the stage, an edge ring FR that is arranged on the cover ring to surround a substrate on the substrate support surface of the stage and has an inner diameter smaller than the inner diameter of the cover ring, a plurality of first support pins 521 that are arranged below the ring support surface, a plurality of second support pins 511 that are arranged below the substrate support surface, a first actuator 522 that moves the plurality of first support pins in the vertical direction, and a second actuator 512 that moves the plurality of second support pins in the vertical direction.SELECTED DRAWING: Figure 2 【課題】交換時期が異なる消耗部材を選択的に交換する基板処理システム及び搬送方法を提供する。【解決手段】真空搬送モジュールと、真空搬送モジュールに接続されるプラズマ処理モジュール及び制御部90を備えるプラズマ処理装置1であって、プラズマ処理モジュールは、プラズマ処理チャンバ10、プラズマ処理チャンバ内に配置され、基板支持面及びリング支持面を有するステージ、ステージのリング支持面上に配置されるカバーリングCR、ステージの基板支持面上の基板を囲むようにカバーリング上に配置され、カバーリングの内径よりも小さい内径を有するエッジリングFR、リング支持面の下方に配置される複数の第1支持ピン521、基板支持面の下方に配置される複数の第2支持ピン511、複数の第1支持ピンを縦方向に移動させる第1アクチュエータ522及び複数の第2支持ピンを縦方向に移動させる第2アクチュエータ512を含む。【選択図】図2