ELECTRIC CHARACTERISTIC TESTING DEVICE AND JIG STORAGE

To provide an electric characteristic testing device which consumes less cost and has a smaller size.SOLUTION: A module-equipped member 4 is equipped with a power semiconductor module 1 with element electrodes 21 to 23 on a surface and an input block 100 with input electrodes 91 to 93 on the surface...

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Hauptverfasser: ODERA SHINGO, YAMAMOTO TADATSUGU
Format: Patent
Sprache:eng ; jpn
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Zusammenfassung:To provide an electric characteristic testing device which consumes less cost and has a smaller size.SOLUTION: A module-equipped member 4 is equipped with a power semiconductor module 1 with element electrodes 21 to 23 on a surface and an input block 100 with input electrodes 91 to 93 on the surface, on a test stage 41. A test jig 3 has test electrodes 31 to 33 and output electrodes 81 to 83 electrically connected together by three internal wires 11, in the jig body 30. A pressing operation of pressing the test jig 3 by a pressing member 44 is performed so that an electrode contact state is set in which the test electrodes 31 to 33 and the element electrodes 21 to 23 are in contact with each other and the output electrodes 81 to 83 and the input electrodes 91 to 93 are in contact with each other.SELECTED DRAWING: Figure 1 【課題】低コスト化及び小型化を図った電気的特性試験装置を提供する。【解決手段】モジュール搭載部材4は試験ステージ41上に、表面に素子電極21~23を有するパワー半導体モジュール1と表面に入力電極91~93を有する入力ブロック100とを搭載している。試験治具3は治具本体30内に、3本の内部配線11を介して電気的接続される試験電極31~33及び出力電極81~83を有している。押圧部材44によって試験治具3を押圧する押圧動作を実行することにより、試験電極31~33と素子電極21~23とが接触し、出力電極81~83と入力電極91~93とが接触する電極接触状態に設定する。【選択図】図1