GRINDING METHOD
To provide a grinding method which does not require a considerably longer time in comparison with a conventional grinding method and in which an effective region that can be used for products can be maximally secured.SOLUTION: A grinding method which is applied in grinding a discoid work-piece which...
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Zusammenfassung: | To provide a grinding method which does not require a considerably longer time in comparison with a conventional grinding method and in which an effective region that can be used for products can be maximally secured.SOLUTION: A grinding method which is applied in grinding a discoid work-piece which has a first surface and a second surface at the opposite side to the first surface when grinding it beginning from the second surface side, includes: a first grinding step of grinding the work-piece while bringing a first grinding stone into contact with the work-piece to form on the work-piece a discoid first thin plate part and an annular first thick plate part surrounding the first thin plate part; and a second grinding step of grinding the work-piece while bringing a second grinding stone into contact with the first thick plate part and the first thin plate part to form on the work-piece a discoid second thin plate part which is larger in diameter and thinner than the first thin plate part and an annular second thick plate part surrounding the second thin plate part, where in the second grinding step, the second grinding stone is brought into contact with a region on the second surface away by a width of the second grinding stone or more from an inner edge of the second surface remaining in the first thick plate part toward the outside.SELECTED DRAWING: Figure 6
【課題】従来の研削方法に比べて大幅に長い時間を要することなく、製品に使用できる有効領域が最大限に確保される研削方法を提供する。【解決手段】第1面と第1面とは反対側の第2面とを有する円板状の被加工物を第2面側から研削する際に適用される研削方法であって、第1研削砥石を被加工物に接触させて被加工物を研削し、円板状の第1薄板部と、第1薄板部を囲む環状の第1厚板部と、を被加工物に形成する第1研削ステップと、第2研削砥石を第1厚板部と第1薄板部とに接触させて被加工物を研削し、第1薄板部よりも直径が大きく薄い円板状の第2薄板部と、第2薄板部を囲む環状の第2厚板部と、を被加工物に形成する第2研削ステップと、を含み、第2研削ステップでは、第1厚板部に残った第2面の内側の縁から外側に向かって第2研削砥石の幅以上に離れた第2面上の領域に第2研削砥石を接触させる。【選択図】図6 |
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