RESIDUAL QUANTITY MEASURING METHOD OF SOLID MATERIAL, SUBLIMATION GAS SUPPLY METHOD AND SUBLIMATION GAS SUPPLY SYSTEM

To provide a measuring method capable of suppressing a residual quantity loss of a solid material in a solid material vessel when supplying sublimation gas of the solid material to a subsequent stage process.SOLUTION: There are provided: a first residual quantity calculation step for calculating a residual quantity of a solid material from such a consumption that sublimation gas is sent from a buffer tank to a subsequent stage process when replenishing sublimation gas into the buffer tank; a second residual quantity calculation step for calculating a residual quantity of the solid material from such a travel that the sublimation gas is sent from a solid material vessel into the buffer tank; and/or a changeover determination step for determining a changeover timing and an abnormality from the residual quantity of the solid material in the solid material vessel.SELECTED DRAWING: Figure 1 【課題】固体材料の昇華ガスを後段のプロセスに供給する際に、固体材料容器内の固体材料の残量損失を抑えることが可能な測定方法を提供する。【解決手段】バッファータンクへ昇華ガスを補充する際に、前記バッファータンクから昇華ガスを後段のプロセスへ送る消費量から固体材料の残量を演算する第一残量演算ステップと、固体材料容器から昇華ガスを前記バッファータンクへ送る移動量から固体材料の残量を演算する第二残量演算ステップと、および／または固体材料容器内の固体材料の残量から切替時期および異常を判断する切替判断ステップと、を含む。【選択図】図１