HOLDING MEMBER AND ELECTROSTATIC CHUCK

To provide a holding member and electrostatic chuck capable of improving heat exchange efficiency with an object to be held.SOLUTION: A plate-shaped member 10 including a holding surface 11 and a lower surface 12 provided on the side opposite to the holding surface 11 includes a plurality of gas holes 16 opening in the holding surface 11, and a plurality of protrusions 13, 14 formed to protrude from the holding surface 11, wherein the plurality of protrusions 13, 14 are an annular protrusion 13 formed in an annular shape along the outer periphery of the holding surface and a plurality of pin-shaped protrusions 14 formed inside the annular protrusion 13, and a texture pattern TP including protrusions 50 having a height lower than those of the plurality of protrusions 13 and 14 is formed in at least part of a region R between the gas hole 16 and the annular protrusion 13 in the holding surface 11.SELECTED DRAWING: Figure 2 【課題】保持する対象物との熱交換効率を向上させることができる保持部材及び静電チャックを提供すること。【解決手段】保持面１１と、保持面１１とは反対側に設けられる下面１２とを備える板状部材１０であって、保持面１１に開口する複数のガス孔１６と、保持面１１から突出して形成される複数の凸部１３，１４と、を有し、複数の凸部１３，１４は、保持面面の外周に沿って環状に形成される環状凸部１３と、環状凸部１３の内側に形成された複数のピン状凸部１４と、を備え、保持面１１のうち、ガス孔１６と環状凸部１３との間における領域Ｒの少なくとも一部に複数の凸部１３，１４の高さより低い高さの突起５０を含むテクスチャパターンＴＰが形成されている。【選択図】図２