PUSHER, CONVEYANCE DEVICE AND SUBSTRATE PROCESSING DEVICE

To improve accuracy of seating detection of a substrate.SOLUTION: A pusher for holding a substrate includes a pusher body and a plurality of seating members 630 which are attached to the pusher body and on which the substrate is seated. Each of the plurality of seating members 630 includes a lever member 634 being a form of a pedestal member having a seating part on which the substrate is seated and a magnet 634-2a which is arranged at a position different from the seating part. The lever member 634 is supported by the pusher body such that the position of the magnet 634-2a moves according to seating or leaving of the substrate. Each of the plurality of seating members 630 includes: a seating sensor 638 configured to detect movement of the magnet 634-2a; and a magnetic member 637 which is arranged so as to block a portion between a movable range of the magnet 634-2a and the seating sensor 638.SELECTED DRAWING: Figure 7 【課題】基板の着座検出の精度を向上させる。【解決手段】基板を保持するためのプッシャは、プッシャ本体と、プッシャ本体に取り付けられており基板が着座する複数の着座部材６３０と、を含む。複数の着座部材６３０はそれぞれ、基板が着座する着座部、および着座部とは異なる位置に配置された磁石６３４－２ａ、を有する台座部材の一形態であるレバー部材６３４を備える。レバー部材６３４は、基板の着座または退座に応じて磁石６３４－２ａの位置が移動するようにプッシャ本体に支持されている。複数の着座部材６３０はそれぞれ、磁石６３４－２ａの移動を検出するように構成された着座センサ６３８と、磁石６３４－２ａの可動域と着座センサ６３８との間の一部を遮蔽するように配置された磁性部材６３７と、を含む。【選択図】図７