OIL ENCLOSING METHO

To introduce oil into a diaphragm chamber by preventing the oil from adhering to a bonding surface of a sensor chip to a support substrate.SOLUTION: A plurality of grooves are formed on another surface of wafer 101 to demarcate a plurality of sensor chip regions 121. A projection part 106 with an oi...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	NAKAJIMA ARINORI, ITO NAOKO
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE PHYSICS TESTING
Online-Zugang:	Volltext bestellen
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