OIL ENCLOSING METHO
To introduce oil into a diaphragm chamber by preventing the oil from adhering to a bonding surface of a sensor chip to a support substrate.SOLUTION: A plurality of grooves are formed on another surface of wafer 101 to demarcate a plurality of sensor chip regions 121. A projection part 106 with an oi...
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| Format: | Patent |
| Sprache: | eng ; jpn |
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| Zusammenfassung: | To introduce oil into a diaphragm chamber by preventing the oil from adhering to a bonding surface of a sensor chip to a support substrate.SOLUTION: A plurality of grooves are formed on another surface of wafer 101 to demarcate a plurality of sensor chip regions 121. A projection part 106 with an oil introduction hole 104 is formed in each of the plurality of sensor chip regions 121. Oil is supplied to each of a top surface of the projection parts 106 in the plurality of demarcated sensor chip regions 121. On the top surface of each of the plurality of projection parts 106, an oil droplet 107 is formed in a hemispherical shape by surface tension.SELECTED DRAWING: Figure 1C
【課題】センサチップの支持基板との接合面に対するオイルの付着を防止して、ダイアフラム室内にオイルを導入する。【解決手段】ウエハ１０１の他方の面に、複数のセンサチップ領域１２１を区画する複数の溝を形成して、複数のセンサチップ領域１２１の各々に、上面にオイル導入孔１０４が配置された凸部１０６を形成し、区画された複数のセンサチップ領域１２１の凸部１０６の上面の各々に、オイルを供給し、複数の凸部１０６の各々の上面に、表面張力で半球状にまとまったオイルの液滴１０７を形成する。【選択図】 図１Ｃ |
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