THICKNESS MEASURING DEVICE AND METHOD FOR MEASURING THICKNESS

To reduce the influence of the temperature of a measurement environment in a measurement of the thickness of a target object.SOLUTION: A thickness measuring device 10 includes: an excitation unit 71 for applying an excitation current to an excitation coil 11 and inducing an eddy current in a target object 9; a detection unit 72 for detecting an eddy current in the target object 9 by a detection coil 12; a thickness deriving unit 84 for determining the thickness d of the target object 9 on the basis of the duration time τ of the eddy current detected by the detection unit 72; a substrate 68 equipped with the excitation unit 71 and the detection unit 72; and a correction unit 85 for correcting a thickness d. The correction unit 85 corrects the thickness d on the basis of the temperature characteristics of the duration time τ related to the temperature of the substrate 68 and the temperature of the excitation coil 11.SELECTED DRAWING: Figure 3 【課題】対象物の厚さ測定において測定環境の温度の影響を低減する。【解決手段】厚さ測定装置１０は、励磁コイル１１に励磁電流を印加して対象物９に渦電流を誘起させる励磁部７１と、対象物９の渦電流を検出コイル１２を介して検出する検出部７２と、検出部７２によって検出された渦電流の継続時間τに基づいて対象物９の厚さｄを求める厚さ導出部８４と、励磁部７１及び検出部７２が実装された基板６８と、厚さｄを補正する補正部８５とを備えている。補正部８５は、基板６８の温度及び励磁コイル１１の温度に関する継続時間τの温度特性に基づいて厚さｄを補正する。【選択図】図３