MICROSCOPIC FEEDBACK FOR IMPROVED MILLING ACCURACY

To disclose a method and a device for unifying measurements of an image base in a milling work flow.SOLUTION: First ion beam milling operation is performed on an edge located at a distance from a final target position on a sample. Using an SEM image of the sample, a distance between a milled edge of...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	JASON AAJAVAK, BRIAN ROUTH JR, MARK BIEDRZYCKI, THOMAS GARY MILLER
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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