SUBSTRATE HOLDING MEMBER

To provide a substrate holding member capable of reducing the number of terminals for supplying a power to each electrode, in a substrate holding member with a plurality of buried electrodes.SOLUTION: A substrate holding member 100 comprises a ceramic base material 110. In the ceramic base material...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	TAKAHASHI KAZUYA, MORITA NAOTOSHI
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC HEATING ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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