SUBSTRATE HOLDING MEMBER

To provide a substrate holding member capable of reducing the number of terminals for supplying a power to each electrode, in a substrate holding member with a plurality of buried electrodes.SOLUTION: A substrate holding member 100 comprises a ceramic base material 110. In the ceramic base material...

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Bibliographische Detailangaben
Hauptverfasser:	TAKAHASHI KAZUYA, MORITA NAOTOSHI
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC HEATING ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	To provide a substrate holding member capable of reducing the number of terminals for supplying a power to each electrode, in a substrate holding member with a plurality of buried electrodes.SOLUTION: A substrate holding member 100 comprises a ceramic base material 110. In the ceramic base material 110, three electrodes 121 to 123, three conductive members 131 to 133, five connection portions 141 to 145, and four terminals 151 to 154 are buried.SELECTED DRAWING: Figure 2 【課題】複数の電極が埋設された基板保持部材において、各電極に電力を供給するための端子の数を少なくすることができる基板保持部材を提供する。【解決手段】基板保持部材１００は、セラミックス基材１１０を備えている。セラミックス基材１１０の内部には、３つの電極１２１～１２３と、３つの導電性部材１３１～１３３と、５つの接続部分１４１～１４５と、４つの端子１５１～１５４とが埋設されている。【選択図】図２