THERMAL TREATMENT APPARATUS, CONTROL METHOD AND PROGRAM

To provide a thermal treatment apparatus for correcting the temperature of thermal treatment in accordance with the number of times of cleaning treatment on a deposit which is deposited on a treatment container, a control method and a program.SOLUTION: The present invention relates to a thermal treatment apparatus which comprises a control device and performs thermal treatment on a treated object housed in a treatment container. The control device includes: a thermal treatment control unit for controlling the thermal treatment in accordance with a treatment condition; a cleaning control unit for controlling cleaning treatment on a deposit which is deposited on the treatment container by the thermal treatment; a cumulative film thickness identification unit for identifying the value of a cumulative film thickness of the deposit which is deposited on the processing container based on the treatment condition according to which the thermal treatment is performed; and a temperature correction unit for correcting the temperature of the thermal treatment based on the value of the cumulative film thickness and a temperature correction amount corresponding to the number of times of cleaning treatment.SELECTED DRAWING: Figure 4 【課題】処理容器に付着した付着物のクリーニング処理の回数に応じて熱処理の温度を補正する熱処理装置、制御方法及びプログラムを提供する。【解決手段】制御装置を有し、処理容器に収納された被処理体を熱処理する熱処理装置であって、制御装置は、処理条件に従って熱処理を制御する熱処理制御部と、熱処理により処理容器に付着した付着物のクリーニング処理を制御するクリーニング制御部と、処理容器に付着している付着物の累積膜厚の値を、熱処理した処理条件に基づいて特定する累積膜厚特定部と、累積膜厚の値及びクリーニング処理の回数に応じた温度補正量に基づいて熱処理の温度を補正する温度補正部と、を有する。【選択図】図４