APPARATUS FOR INSPECTING CHEMICAL SOLUTION AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME

To provide an apparatus for inspecting a chemical solution capable of inspecting a bubble and a particle only by adding a simple configuration, and a substrate processing apparatus including the same.SOLUTION: An apparatus 100 for inspecting a chemical solution comprises: a base unit 110 formed with...

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Bibliographische Detailangaben

Hauptverfasser:	JUNG SUNG CHUL, YUN YOUNG UN, SONG YOUNG JUN
Format:	Patent
Sprache:	eng ; jpn
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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