WIRE SAW AND WORKPIECE PROCESSING METHOD USING THE SAME

To provide a wire saw excellent in processing accuracy and processing efficiency, and a workpiece processing method using the same.SOLUTION: A wire saw includes: a plurality of wire guides 5 that are driven to rotate; a wire 3 wound in between the wire guides to form a wire row; a workpiece holding member 6 that holds a workpiece W so as to be movable in a direction orthogonal to an axial direction of the wire and presses the workpiece against the wire row; a support frame 22 that supports the workpiece holding member; a wire guide displacement measurement device 7 that measures an amount of displacement of the wire guide in a direction parallel to the wire arrangement direction of the wire row; and a temperature controlled water control device 8 that controls temperature controlled water to be supplied to a temperature controlled water passage 30 formed in the inside of the support frame. The temperature controlled water control device controls the temperature controlled water on the basis of the amount of displacement of the wire guide that has been measured by the wire guide displacement measurement device, and thereby the support frame is elastically deformed in the direction parallel to the wire arrangement direction of the wire row.SELECTED DRAWING: Figure 1 【課題】加工精度及び加工効率に優れたワイヤソー及びそれを用いたワーク加工方法を提供する。【解決手段】回転駆動される複数のワイヤガイド５と、ワイヤガイド間に巻回されてワイヤ列を形成するワイヤ３と、ワイヤの軸方向と直交する方向へワークＷを移動可能に保持し、ワイヤ列へワークを押し当てるワーク保持部材６と、ワーク保持部材を支持する支持フレーム２２と、ワイヤガイドの、ワイヤ列のワイヤ並び方向と平行な方向への変位量を測定するワイヤガイド変位測定装置７と、支持フレームの内部に形成された温調水通路３０へ供給される温調水を制御する温調水制御装置８とを備え、温調水制御装置が、ワイヤガイド変位測定装置が測定したワイヤガイドの変位量に基づいて温調水を制御することにより、支持フレームを、ワイヤ列のワイヤ並び方向と平行な方向へ弾性変形させる。【選択図】図１